The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2012
Filed:
Oct. 27, 2009
Applicants:
Arnaud Castex, Grenoble, FR;
Gweltaz Gaudin, Grenoble, FR;
Marcel Broekaart, Theys, FR;
Inventors:
Assignee:
Soitec, Bernin, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of bonding a first substrate to a second substrate by molecular bonding by forming an insulating layer on the bonding face of the first substrate, chemical-mechanical polishing of the insulating layer, activating a bonding surface of the second substrate by plasma treatment, etching an exposed surface of the insulating layer, and bonding together the two substrates together by molecular bonding wherein the etching is conducted after the chemical-mechanical polishing and before the bonding.