The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2012
Filed:
Jul. 27, 2009
Norinao Kouma, Kawasaki, JP;
Osamu Tsuboi, Kawasaki, JP;
Yoshihiro Mizuno, Kawasaki, JP;
Hiromitsu Soneda, Kawasaki, JP;
Hisao Okuda, Kawasaki, JP;
Tsuyoshi Matsumoto, Kawasaki, JP;
Ippei Sawaki, Kawasaki, JP;
Norinao Kouma, Kawasaki, JP;
Osamu Tsuboi, Kawasaki, JP;
Yoshihiro Mizuno, Kawasaki, JP;
Hiromitsu Soneda, Kawasaki, JP;
Hisao Okuda, Kawasaki, JP;
Tsuyoshi Matsumoto, Kawasaki, JP;
Ippei Sawaki, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A method for manufacturing a micro movable element includes: forming a movable section, a frame, and a connecting section connecting the movable section with the frame on a substrate; bonding a film to a surface of the substrate in forming the movable section, the frame, and the connecting section; and patterning the film to form a support structure being bridged between the movable section and the frame.