The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2012
Filed:
Sep. 01, 2010
Hiroshi Sone, Sagamihara, JP;
Ryuji Higashisaka, Kawasaki, JP;
Kazutoshi Yoshibayashi, Kawasaki, JP;
Tatsunori Sato, Fuchu, JP;
Tatsuhiro Takahashi, Hino, JP;
Hiroshi Sone, Sagamihara, JP;
Ryuji Higashisaka, Kawasaki, JP;
Kazutoshi Yoshibayashi, Kawasaki, JP;
Tatsunori Sato, Fuchu, JP;
Tatsuhiro Takahashi, Hino, JP;
Canon Anelva Corporation, Kawasaki-shi, JP;
Abstract
A robot according to this invention includes a driving mechanism, a first arm rotatably connected to the driving mechanism, a second arm rotatably connected to the first arm, and an X-shaped end effector rotatably disposed at the distal end of the second arm. Of the four distal ends of the end effector, two distal ends include holding units which can hold substrates in one direction, and the remaining two distal ends include holding units which can hold substrates in the opposite direction.