The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2012
Filed:
Apr. 08, 2009
Applicants:
Hideki Enomoto, Ikoma, JP;
Katsumi Kakimoto, Katano, JP;
Inventors:
Hideki Enomoto, Ikoma, JP;
Katsumi Kakimoto, Katano, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 13/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A diaphragm section has a mesh-like beam section which partitions the diaphragm section into a plurality of rectangular regions, and a thin film section formed in the region partitioned by the beam section, and the thickness of the thin film section is less than that of the beam section.