The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2012
Filed:
Mar. 04, 2008
Applicants:
Robert John Wilby, Bristol, GB;
Adrian Kiermasz, Bristol, GB;
Inventors:
Robert John Wilby, Bristol, GB;
Adrian Kiermasz, Bristol, GB;
Assignee:
Metryx Limited, Bristol, GB;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/00 (2006.01); G06F 19/00 (2011.01);
U.S. Cl.
CPC ...
Abstract
Measuring apparatus and method for monitoring fabrication of a semiconductor wafer by exciting and measuring vibrations of the wafer substrate. A measurable parameter of vibration (e.g. frequency) is indicative of mass of a vibrating region. Mass change caused by wafer treatment is reflected in changes in vibration measurements taken before and after that treatment. The apparatus includes a wafer support e.g. projecting ledge (), a vibration exciting device e.g. contact probe () or pressure differential applicator, and a measurement device e.g. frequency sensor ().