The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2012
Filed:
Dec. 08, 2008
Richard John Jibb, Amherst, NY (US);
John Fredric Billingham, Getzville, NY (US);
Edward Duffy, Inchicore, IE;
Noel O'shaughnessy, Castleknock, IE;
Kevin Mcmahon, Kilkee, IE;
Peter Ferris, Celbridge, IE;
Richard John Jibb, Amherst, NY (US);
John Fredric Billingham, Getzville, NY (US);
Edward Duffy, Inchicore, IE;
Noel O'Shaughnessy, Castleknock, IE;
Kevin McMahon, Kilkee, IE;
Peter Ferris, Celbridge, IE;
Praxair Technology, Inc., Danbury, CT (US);
Abstract
A heat exchange system and processes for a magnetic annealing tool is provided. The system includes a process chamber housing workpieces to be processed; an element chamber partly surrounding the periphery of the process chamber, at least one means for drawing a vacuum in fluid communication with the process chamber and separately with the element chamber in order to apply a vacuum to either or both of the process and element chamber so as to promote radiation heating of the workpieces; at least one supply of fluid in communication with the process chamber and separately with the element chamber to supply a cooling gas so as to promote conductive cooling of the workpieces; a cooling chamber disposed to surround the element chamber; and means for generating a magnetic field disposed on the outer periphery of the cooling chamber.