Defect repairing apparatus, defect repairing method, program, and computer-readable recording medium

Abstract

A defect repairing apparatus () capable of efficiently repairing defects includes: a substrate-mounting plate () for securing a substrate conveyed; a plurality of droplet discharge units () disposed along a direction different from the direction of conveyance of the substrate as seen from a direction perpendicular to the substrate secured by the substrate-mounting plate (), which discharge droplets onto defects scattered about on the substrate; a head gantry unit () on which the plurality of droplet discharge units () have been mounted; and a gantry sliding mechanism () for moving the head gantry unit () relatively at a constant velocity along the direction of conveyance of the substrate, the droplet discharge units () moving each independently along a direction different from the direction of conveyance in accordance with data indicative of the positions of the defects scattered about on the substrate, while the head gantry unit () is moving along the direction of conveyance of the substrate.