The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 12, 2012

Filed:

Mar. 12, 2010
Applicants:

Mitsuo Konno, Tsukuba, JP;

Tsuyoshi Ikehara, Tsukuba, JP;

Takayuki Takano, Tsukuba, JP;

Takashi Mihara, Tokyo, JP;

Inventors:

Mitsuo Konno, Tsukuba, JP;

Tsuyoshi Ikehara, Tsukuba, JP;

Takayuki Takano, Tsukuba, JP;

Takashi Mihara, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 29/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

There is provided a technique that can increase sensitivity of a resonator. A ratio Rb/Ra between an inner diameter Rb and an outer diameter Ra of the resonatoris appropriately selected, and thus there may be a fixed point where an r component (U(Ra) or U(Rb)) of displacement in a radial direction and an r component (V(Ra) or V(Rb)) of displacement in a tangential direction are 0 on an outer diameter portion or an inner diameter portion of the resonator. In this case, the resonatoris supported by a holding memberconstituted by a single-span beam set so that a boundary condition on a side of the resonatoris pinned and a boundary condition on a side of an anchor that supports the resonatoris clamped at the fixed point, and this prevents vibration energy of the resonatorfrom being lost through the holding member, avoids a state to disturb a vibration mode, and achieves a sensor having high sensitivity.


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