Semiconductor integrated circuit for monitoring characteristics of a semiconductor chip

Abstract

Provided is a semiconductor integrated circuit that includes a monitoring circuit for monitoring characteristics of a semiconductor chip. The semiconductor integrated circuit comprises a first terminal with a first voltage and a second terminal with a second voltage. The semiconductor integrated circuit also comprises an inverter chain circuit comprising a plurality of inverters connected in cascade. Each of the plurality of inverters includes a first transistor and a second transistor. The first transistors included in the inverters located at either odd-number orders or even-number orders counted from an input terminal side of an inverter chain circuit function as pre-charge transistors. The pre-charge transistors have a conductivity type different from a conductivity type of the first transistors other then the pre-charge transistors.