The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2012
Filed:
Jan. 22, 2010
Applicants:
Sanjiv Sambandan, Palo Alto, CA (US);
William S. Wong, San Carlos, CA (US);
Rene A. Lujan, Sunnyvale, CA (US);
Scott J. Limb, Palo Alto, CA (US);
Inventors:
Sanjiv Sambandan, Palo Alto, CA (US);
William S. Wong, San Carlos, CA (US);
Rene A. Lujan, Sunnyvale, CA (US);
Scott J. Limb, Palo Alto, CA (US);
Assignee:
Palo Alto Research Center Incorporated, Palo Alto, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 31/102 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming a sensor array. The method includes depositing a source/drain contact layer; depositing a semiconductor layer on the source/drain contact layer; and patterning the source/drain contact layer and the semiconductor layer substantially simultaneously, wherein the patterned semiconductor layer forms part of a sensor of the sensor array.