The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2012
Filed:
Jun. 29, 2010
Mehrdad M. Moslehi, Los Altos, CA (US);
David Xuan-qi Wang, Fremont, CA (US);
Sam Tone Tor, Pleasanton, CA (US);
Karl-josef Kramer, San Jose, CA (US);
Mehrdad M. Moslehi, Los Altos, CA (US);
David Xuan-Qi Wang, Fremont, CA (US);
Sam Tone Tor, Pleasanton, CA (US);
Karl-Josef Kramer, San Jose, CA (US);
Solexel, Inc., Milpitas, CA (US);
Abstract
The present disclosure relates to methods and apparatuses template. The method involves forming a mechanically weak layer conformally on a semiconductor template. Then forming a thin for releasing a thin semiconductor substrate from a reusable semiconductor substrate conformally on the mechanically weak layer. The thin semiconductor substrate, the mechanically weak layer and the template forming a wafer. Then defining the border of the thin-film semiconductor substrate to be released by exposing the peripheral of the mechanically weak layer. Then releasing the thin-film semiconductor substrate by applying a controlled air flow parallel to said mechanically weak layer wherein the controlled air flow separates the thin semiconductor substrate and template according to lifting forces.