The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2012
Filed:
Apr. 18, 2011
Yu Wang, Fremont, CA (US);
Tiesheng LI, San Jose, CA (US);
Sung-shan Tai, San Jose, CA (US);
Hong Chang, Cupertino, CA (US);
Yu Wang, Fremont, CA (US);
Tiesheng Li, San Jose, CA (US);
Sung-Shan Tai, San Jose, CA (US);
Hong Chang, Cupertino, CA (US);
Alpha & Omega Semiconductor Incorporated, Sunnyvale, CA (US);
Abstract
This invention discloses a semiconductor wafer for manufacturing electronic circuit thereon. The semiconductor substrate further includes an etch-back indicator that includes trenches of different sizes having polysilicon filled in the trenches and then completely removed from some of the trenches of greater planar trench dimensions and the polysilicon still remaining in a bottom portion in some of the trenches having smaller planar trench dimensions.