The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2012
Filed:
Oct. 19, 2011
Hee-cheol Kang, Yongin, KR;
Hyun-sook Park, Yongin, KR;
Jae-kwang Ryu, Yongin, KR;
Yong-sup Choi, Yongin, KR;
Yun-mi Lee, Yongin, KR;
Sang-soo Kim, Yongin, KR;
Hee-Cheol Kang, Yongin, KR;
Hyun-Sook Park, Yongin, KR;
Jae-Kwang Ryu, Yongin, KR;
Yong-Sup Choi, Yongin, KR;
Yun-Mi Lee, Yongin, KR;
Sang-Soo Kim, Yongin, KR;
Samsung Mobile Display Co., Ltd., Yongin, KR;
Abstract
A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.