The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2012
Filed:
Jul. 17, 2009
Hans-juergen Heinrich, Grossroehrsdorf, DE;
Goetz Grosser, Dresden, DE;
Sven Haehne, Dresden, DE;
Ulf Seyfert, Dresden, DE;
Hans-Juergen Heinrich, Grossroehrsdorf, DE;
Goetz Grosser, Dresden, DE;
Sven Haehne, Dresden, DE;
Ulf Seyfert, Dresden, DE;
VON ARDENNE Anlagentechnik GmbH, Dresden, DE;
Abstract
An end block for a magnetron device having a rotatable target comprises an end block housing having a pivot bearing. The end block housing is adapted on its outer side for attachment on a support unit, and the pivot bearing is adapted on an end that is accessible from outside the end block housing, for connection to the rotatable target. The end block housing is movably attached on the support unit. A vacuum coating apparatus has a vacuum chamber, a magnetron device situated in the vacuum chamber, and a rotatable target rotatably mounted on at least one such end block.