The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2012
Filed:
Oct. 20, 2005
Uwe Hoffmann, Alzenau, DE;
Manfred Schreil, Dresden, DE;
Jose Manuel Dieguez-campo, Hanau, DE;
Marcus Bender, Hanau, DE;
Uwe Hoffmann, Alzenau, DE;
Manfred Schreil, Dresden, DE;
Jose Manuel Dieguez-Campo, Hanau, DE;
Marcus Bender, Hanau, DE;
Applied Materials GmbH & Co. KG, Alzenau, DE;
Abstract
The invention relates to an arrangement for the coating of substrates, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or above the vaporization temperature of the material to be vaporized. The vapor barrier is implemented as a quartz valve, which includes a spherical closure part connected with a movable rod. In a first position this spherical closure part closes a vapor conducting tube, which is connected with the evaporation source, and, in a second position, the spherical closure part abuts a spherical calotte which seals off a quartz tube.