The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2012
Filed:
Sep. 24, 2007
David William Gotthold, Lino Lakes, MN (US);
Richard Charles Bresnahan, Cottage Grove, MN (US);
Scott Wayne Priddy, Saint Louis Park, MN (US);
Mark Lee O'steen, Centerville, MN (US);
David William Gotthold, Lino Lakes, MN (US);
Richard Charles Bresnahan, Cottage Grove, MN (US);
Scott Wayne Priddy, Saint Louis Park, MN (US);
Mark Lee O'Steen, Centerville, MN (US);
Veeco Instruments Inc., Woodbury, NY (US);
Abstract
The present invention relates to vacuum depositions systems and related deposition methods. Vacuum deposition systems that use one or more cyropanels for localized pumping of a deposition region where a substrate is positioned are provided. The present invention is particularly applicable to pumping and minimizing reevaporation of high vapor pressure deposition materials during molecular beam epitaxy.