The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2012
Filed:
Feb. 25, 2010
Takeshi Shirai, Yokohama, JP;
Takao Kokubun, Fuchu, JP;
Hitoshi Ishizawa, Kawasaki, JP;
Atsunobu Murakami, Fuchu, JP;
Takeshi Shirai, Yokohama, JP;
Takao Kokubun, Fuchu, JP;
Hitoshi Ishizawa, Kawasaki, JP;
Atsunobu Murakami, Fuchu, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.