The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2012
Filed:
Jul. 02, 2009
Masashi Nakata, Kanagawa, JP;
Haruhiko Ajisawa, Kanagawa, JP;
Naotsugu Yoshida, Kumamoto, JP;
Yasuhiro Nakana, Kumamoto, JP;
Junichi Furukawa, Kanagawa, JP;
Yoshinori Toumiya, Kanagawa, JP;
Junichiro Fujimagari, Kanagawa, JP;
Masashi Nakata, Kanagawa, JP;
Haruhiko Ajisawa, Kanagawa, JP;
Naotsugu Yoshida, Kumamoto, JP;
Yasuhiro Nakana, Kumamoto, JP;
Junichi Furukawa, Kanagawa, JP;
Yoshinori Toumiya, Kanagawa, JP;
Junichiro Fujimagari, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
A solid-state imaging device includes a semiconductor substrate having a pixel region including a photoelectric conversion portion, a wiring portion including a conductor line and disposed on the semiconductor substrate with an insulating film therebetween, a metal pad connected to the conductor line, a pad-coating insulating film coating the metal pad, and a waveguide material layer. The wiring portion and the pad-coating insulating film each have an opening therein over the photoelectric conversion portion, and the openings continue from each other to define a waveguide opening having an open side and a closed side. The waveguide material layer is disposed in the waveguide opening and on the pad-coating insulating film with a passivation layer therebetween. The pad-coating insulating film has a thickness of 50 to 250 nm and a face defining the opening. The face is slanted so as to diverge toward the open side of the opening.