The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2012
Filed:
Jan. 13, 2009
Gary Yama, Mountain View, CA (US);
Beth Pruitt, San Francisco, CA (US);
Arnoldus Alvin Barlian, Palo Alto, CA (US);
Gary Yama, Mountain View, CA (US);
Beth Pruitt, San Francisco, CA (US);
Arnoldus Alvin Barlian, Palo Alto, CA (US);
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A method of forming a device with a piezoresistor is disclosed herein. In one embodiment, the method includes providing a substrate, etching a trench in the substrate to form a vertical wall, growing a piezoresistor layer epitaxially on the vertical wall, and separating the vertical wall from an underlying layer of the substrate that extends along a horizontal plane such that the piezoresistor layer is movable with respect to the underlying layer within the horizontal plane.