The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2012
Filed:
Jul. 09, 2008
Applicants:
Marc S. Weinberg, Needham, MA (US);
Mirela G. Bancu, Melrose, MA (US);
James A. Bickford, Winchester, MA (US);
Jonathan J. Bernstein, Medfield, MA (US);
Richard Elliott, Stoneham, MA (US);
Inventors:
Marc S. Weinberg, Needham, MA (US);
Mirela G. Bancu, Melrose, MA (US);
James A. Bickford, Winchester, MA (US);
Jonathan J. Bernstein, Medfield, MA (US);
Richard Elliott, Stoneham, MA (US);
Assignee:
The Charles Stark Draper Laboratory, Inc., Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); G01P 15/125 (2006.01); G01C 19/56 (2012.01);
U.S. Cl.
CPC ...
Abstract
A sensor includes a proof mass suspended by a suspension beam, the suspension beam having a thickness less than a thickness of the proof mass.