The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 29, 2012

Filed:

Jan. 30, 2009
Applicants:

Masami Nakagame, Odawara, JP;

Hiroyuki Nishida, Odawara, JP;

Hideaki Takeuchi, Odawara, JP;

Inventors:

Masami Nakagame, Odawara, JP;

Hiroyuki Nishida, Odawara, JP;

Hideaki Takeuchi, Odawara, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 14/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The conveying unit conveys a long sheet-like subject in its longitudinal direction. The conveying unit includes a stepped roller which has large-diameter portions spaced apart from each other in a direction perpendicular to a direction of conveyance of the sheet-like subject and having a larger diameter than a remainder of the stepped roller being a small-diameter portion of the stepped roller, the large-diameter portions supporting and conveying the sheet-like subject, a closed space forming subunit between the small-diameter portion of the stepped roller and the sheet-like subject and a gas supply subunit for supplying a gas to the closed space. The vacuum deposition device forms a film on a surface of a long substrate by vacuum deposition. The vacuum deposition device includes a vacuum chamber, a conveying device which includes the conveying unit and a film forming unit.


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