The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2012
Filed:
Mar. 24, 2009
Yizhen Lin, Gilbert, AZ (US);
Todd F. Miller, Scottsdale, AZ (US);
Woo Tae Park, Chandler, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A transducer () includes sensors () that are bonded to form a vertically integrated configuration. The sensor () includes a proof mass () movably coupled to and spaced apart from a surface () of a substrate (). The sensor () includes a proof mass () movably coupled to and spaced apart from a surface () of a substrate (). The substrates () are coupled with the surface () of substrate () facing the surface () of substrate (). Thus, the proof mass () faces the proof mass (). The sensors () are fabricated separately and can be formed utilizing differing micromachining techniques. The sensors () are subsequently coupled () utilizing a wafer bonding technique to form the transducer (). Embodiments of the transducer () may include sensing along one, two, or three orthogonal axes and may be adapted to detect movement at different acceleration sensing ranges.