The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 22, 2012

Filed:

Feb. 20, 2009
Applicants:

Horst Schreiber, Rochester, NY (US);

Paul Michael Then, Victor, NY (US);

Inventors:

Horst Schreiber, Rochester, NY (US);

Paul Michael Then, Victor, NY (US);

Assignee:

Corning Incorporated, Corning, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/42 (2006.01);
U.S. Cl.
CPC ...
Abstract

High-power excimer lasers are assembled with individually replaceable optical module subsystems containing consumable optical components. Windows formed in the enclosures of the optical modules incorporate a fluorescent material for converting ultraviolet light scattered from the components of the optical module into visible light emanating from the windows. Changes in the amount or location of the visible light emanating from the windows are interpreted as indications of the degradation in the performance of the optical modules.


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