The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2012
Filed:
Dec. 14, 2010
Martin Dinant Bijker, Helmond, NL;
Leonardus Peterus Maria Clijsen, Eindhoven, NL;
Franciscus Cornelius Dings, Veldhoven, NL;
Remco Leonardus J. Robertus Pennings, Eindhoven, NL;
Martin Dinant Bijker, Helmond, NL;
Leonardus Peterus Maria Clijsen, Eindhoven, NL;
Franciscus Cornelius Dings, Veldhoven, NL;
Remco Leonardus J. Robertus Pennings, Eindhoven, NL;
OTB Solar B.V., Eindhoven, NL;
Abstract
A cascade source provided with a cathode housing, a number of cascade plates insulated from each other and stacked on top of each other which together bound at least one plasma channel, and an anode plate provided with an outflow opening connecting to the plasma channel, wherein one cathode is provided per plasma channel, which cathode comprises an electrode which is adjustable relative to the cathode housing in the direction of the plasma channel, wherein the clamping provision is preferably of the collet chuck type. Also described is method for controlling the cascade source in use.