The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8180473 B1

PDF
Full Text
Expired
Date of Patent:
May. 15, 2012

Filed:

Mar. 23, 2010
Applicant:

Takashi Ito, Utsunomiya, JP;

Inventor:

Takashi Ito, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2011.01);
U.S. Cl.
CPC ...
Abstract

An exposure system is configured to update control software installed on an exposure apparatus to new control software. The exposure system comprises: at least one exposure apparatus; a simulator configured to test an operation of the exposure apparatus; an output unit configured to output configuration information of the exposure apparatus, which includes information representing a temporal change of the exposure apparatus; a reflecting unit configured to reflect the temporal change of the exposure apparatus on the simulator based on the configuration information output from the output unit; and an updating unit configured to update control software installed on the simulator to new control software.


Find Patent Forward Citations

Ito, Takashi. (2012). Exposure system, method of testing exposure apparatus, and method of manufacturing device (U.S. Patent No. 8180473). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8180473

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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