The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2012
Filed:
Mar. 28, 2008
Scott Samson, Largo, FL (US);
Sunny Kedia, Largo, FL (US);
Vandana Upadhyay, Melbourne, FL (US);
Rahul Agrawal, Clearwater, FL (US);
Scott Samson, Largo, FL (US);
Sunny Kedia, Largo, FL (US);
Vandana Upadhyay, Melbourne, FL (US);
Rahul Agrawal, Clearwater, FL (US);
University of South Florida, Tampa, FL (US);
Abstract
The present invention provides an improved electrostatic micro actuator array system comprising a plurality of electrostatic micro actuators, each of the micro actuators further comprising at least one hold-down electrode and at least two pull-down electrodes positioned to actuate the micro actuator. A hold-down signal line is then coupled to each of the hold-down electrodes of each of the plurality of micro actuators and a plurality of first pull-down signal lines coupled to one of the at least two pull-down electrodes of each micro actuator and a plurality of second pull-down signal lines coupled to another of the at least two pull-down electrodes of each micro actuator, the first pull-down signal lines and the second pull-down signal lines configured in a cross-point matrix such that a unique pair of first pull-down signal lines and second pull-down signal lines is associated with each of the plurality of micro actuators. The system and method of the present invention reduces the number of driving lines required for the micro actuator array. In a particular embodiment, a reconfigurable microelectromechanical (MEMS) micromirror array system capable of deflecting incident light onto or away from a detector is described.