The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2012
Filed:
Aug. 01, 2011
Yoshikazu Katou, Tokyo, JP;
Takahiro Igeta, Toyko, JP;
Hideyuki Moribe, Tokyo, JP;
Ryuji Hasegawa, Tokyo, JP;
Yoshikazu Katou, Tokyo, JP;
Takahiro Igeta, Toyko, JP;
Hideyuki Moribe, Tokyo, JP;
Ryuji Hasegawa, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.