The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2012
Filed:
Feb. 20, 2009
Takeo Ishibashi, Hyogo, JP;
Miwako Ishibashi, Legal Representative, Nagoya, JP;
Mamoru Terai, Tokyo, JP;
Takuya Hagiwara, Kawasaki, JP;
Osamu Yokokoji, Kanagawa, JP;
Yoko Takebe, Kanagawa, JP;
Takeo Ishibashi, Hyogo, JP;
Miwako Ishibashi, legal representative, Nagoya, JP;
Mamoru Terai, Tokyo, JP;
Takuya Hagiwara, Kawasaki, JP;
Osamu Yokokoji, Kanagawa, JP;
Yoko Takebe, Kanagawa, JP;
Renesas Electronics Corporation, Kanagawa, JP;
Asahi Glass Company, Limited, Tokyo, JP;
Abstract
It is an object of the present invention to provide a water repellant composition for a substrate to be exposed which inhibits the back side of a substrate to be exposed from being contaminated by an immersion liquid, can improve adhesion between a film to be processed and an organic film directly overlying that film to inhibit film peeling, and has excellent workability, a method for forming a resist pattern, an electronic device produced by the formation method, a treatment method for imparting water repellency to a substrate to be exposed, a water repellent set for a substrate to be exposed, and a treatment method for imparting water repellency to a substrate to be exposed using the same. A water repellent composition for a substrate to be exposed including at least an organosilicon compound represented by the following general formula (1) and a solvent is used. In the formula, Ris a monovalent organic group having 14 to 30 carbon atoms, each R, R, and Ris independently a monovalent organic group or a hydrolyzable group having 1 to 10 carbon atoms, and at least one of R, R, and Ris a hydrolyzable group.