The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 15, 2012

Filed:

Mar. 31, 2004
Applicants:

Kiran K. Baikerikar, Midland, MI (US);

Shaoguang Feng, Midland, MI (US);

Jack E. Hetzner, Reese, MI (US);

John M. Maher, Charleston, WV (US);

Michael E. Mills, Midland, MI (US);

Paul J. Popa, Auburn, MI (US);

Richard J. Strittmatter, Batavia, IL (US);

Larry R. Wilson, Beaverton, MI (US);

Inventors:

Kiran K. Baikerikar, Midland, MI (US);

Shaoguang Feng, Midland, MI (US);

Jack E. Hetzner, Reese, MI (US);

John M. Maher, Charleston, WV (US);

Michael E. Mills, Midland, MI (US);

Paul J. Popa, Auburn, MI (US);

Richard J. Strittmatter, Batavia, IL (US);

Larry R. Wilson, Beaverton, MI (US);

Attorney:
Int. Cl.
CPC ...
B05D 5/06 (2006.01); H01L 21/312 (2006.01);
U.S. Cl.
CPC ...
Abstract

Silane compositions having an aromatic functionality and a ethylenically functionality and comprising a latent acid catalyst are deposited in two or more layers on a substrate. Each layer differs in light absorption properties from an adjacent layer. Some layers may have different curing mechanisms. Such a method is useful in forming antireflective coatings.


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