The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Apr. 28, 2005
Frank Fischer, Gomaringen, DE;
Eckhard Graf, Gomaringen, DE;
Heiko Stahl, Reutlingen, DE;
Hartmut Kueppers, Reutlingen, DE;
Roland Scheuerer, Reutlingen, DE;
Frank Fischer, Gomaringen, DE;
Eckhard Graf, Gomaringen, DE;
Heiko Stahl, Reutlingen, DE;
Hartmut Kueppers, Reutlingen, DE;
Roland Scheuerer, Reutlingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A micromechanical component having at least two caverns is provided, the caverns being delimited by the micromechanical component and a cap, and the caverns having different internal atmospheric pressures. The micromechanical component and cap are hermetically joined to one another at a first specifiable atmospheric pressure, then an access to at least one cavern is produced, and subsequently the access is hermetically closed off at a second specifiable atmospheric pressure.