The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Mar. 18, 2005
Jeroen Jonkers, Aachen, DE;
Levinus Pieter Bakker, Helmond, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Jeroen Jonkers, Aachen, DE;
Levinus Pieter Bakker, Helmond, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
A method for removing contaminant particles, such as atoms, molecules, clusters, ions, and the like, produced by a radiation source during generation of short-wave radiation having a wavelength of up to approximately 20 nm, includes guiding a first gas between the radiation source and a particle trap arranged in a wall of a chamber. In order to protect an optical device and/or articles to be irradiated against contamination, the method introducing a second gas into the chamber and its pressure is adjusted such that it is at least as high as the pressure of the first gas.