The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Jul. 11, 2007
Applicant:
Marco Erler, Oberkochen, DE;
Inventor:
Marco Erler, Oberkochen, DE;
Assignee:
Carl Zeiss Industrielle Messtechnik GmbH, Oberkochen, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01D 18/00 (2006.01); G03B 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for operating an assembly configured to produce electromagnetic radiation, especially X-ray radiation or extreme ultraviolet radiation. Particles, especially electrons, are guided onto a target by way of an adjustable focusing device. The particles produce electromagnetic radiation in the target. At least one object, especially a calibration object, is penetrated by the electromagnetic radiation and a radiogram of the object is recorded. The radiogram or a plurality of radiograms is automatically evaluated and the focusing device is adjusted depending on the evaluation.