The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Nov. 03, 2008
Hirofumi Nishibayashi, Settsu, JP;
Takafumi Yamato, Settsu, JP;
Katsuhiko Higashino, Settsu, JP;
Hiroyuki Tanaka, Settsu, JP;
Tsuyoshi Noguchi, Settsu, JP;
Hirofumi Nishibayashi, Settsu, JP;
Takafumi Yamato, Settsu, JP;
Katsuhiko Higashino, Settsu, JP;
Hiroyuki Tanaka, Settsu, JP;
Tsuyoshi Noguchi, Settsu, JP;
Daikin Industries, Ltd., Osaka, JP;
Abstract
The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NFplasma treatment and Otreatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m/g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NFplasma irradiation is at most 0.20%.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile