The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 08, 2012

Filed:

Dec. 03, 2009
Applicants:

Wataru Sumida, Kanagawa, JP;

Kenya Kobayashi, Kanagawa, JP;

Inventors:

Wataru Sumida, Kanagawa, JP;

Kenya Kobayashi, Kanagawa, JP;

Assignee:

Renesas Electronics Corporation, Kawasaki-shi, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method (and resultant structure) includes forming a semiconductor layer having plural stripe-like trenches, forming a gate electrode buried partially in each of the plural trenches, and introducing an impurity into the semiconductor layer by ion implantation after forming the gate electrode. The gate electrode has a buried portion formed in each of the trenches and a protruding portion situating above the buried portion and having a width larger than that of the buried portion. The introducing the impurity includes introducing an impurity into the semiconductor layer below the protruding portion by oblique ion implantation.


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