The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Jul. 21, 2009
Tatsuro Masuyama, Toyonaka, JP;
Kazuhiko Hashimoto, Toyonaka, JP;
Takashi Hiraoka, Hannan, JP;
Ichiki Takemoto, Kawanishi, JP;
Tatsuro Masuyama, Toyonaka, JP;
Kazuhiko Hashimoto, Toyonaka, JP;
Takashi Hiraoka, Hannan, JP;
Ichiki Takemoto, Kawanishi, JP;
Sumitomo Chemical Company, Limited, Tokyo, JP;
Abstract
An oxime compound represented by the formula (I): wherein Y represents an unsubstituted or substituted n-valent C6-C14 aromatic hydrocarbon group, n represents an integer of 1 to 6, Rrepresents a C1-C30 aliphatic hydrocarbon group etc., Rrepresents a linear or branched chain C1-C20 aliphatic hydrocarbon group etc., W represents —CO—O— etc., Qand Qeach independently represent a fluorine atom etc., Z represents a C1-C20 halogenated aliphatic hydrocarbon group etc, and the resist composition containing the same.