The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 08, 2012

Filed:

Jan. 21, 2009
Applicants:

Ted W. Barnes, Corvallis, OR (US);

Victorio Chavarria, Corvallis, OR (US);

William J. Sudyka, Corvallis, OR (US);

Adam Ghozeil, Corvallis, OR (US);

Timothy R. Emery, Corvallis, OR (US);

Inventors:

Ted W. Barnes, Corvallis, OR (US);

Victorio Chavarria, Corvallis, OR (US);

William J. Sudyka, Corvallis, OR (US);

Adam Ghozeil, Corvallis, OR (US);

Timothy R. Emery, Corvallis, OR (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract

Methods and apparatus for determining the extent of etching in material by locating a detector element adjacent to a portion of the material that is to be etched. The width of the element varies. The resistance of the element is measured upon etching the portion.


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