The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Oct. 15, 2004
Toshikazu Suganuma, Chiba, JP;
Yasushi Tomita, Chiba, JP;
Kazunari Sakai, Yotsukaido, JP;
Naoki Hada, Sakura, JP;
Katsuhiko Kazama, Chiba, JP;
Toshikazu Suganuma, Chiba, JP;
Yasushi Tomita, Chiba, JP;
Kazunari Sakai, Yotsukaido, JP;
Naoki Hada, Sakura, JP;
Katsuhiko Kazama, Chiba, JP;
Dainippon Ink and Chemicals, Inc., Tokyo, JP;
KITZ SCT Corporation, Tokyo, JP;
Abstract
There is provided a liquid supply method in which, when preparing a solution that can be used as washing water and the like by supplying a minute amount of chemicals and the like to ultrapure water, the amount of supply solution that is supplied can be accurately determined. In this liquid supply method, a solution is prepared by supplying a supply liquid to a primary fluid that is circulating in a primary fluid circulation tube (). This liquid supply method uses a liquid supply apparatus () that includes: a supply section () that delivers the supply liquid; and a supply liquid circulation tube () that causes the supply liquid to flow from the supply section () to the primary fluid circulation tube (), the internal diameter of the supply liquid circulation tube () being between 0.01 and 1 mm. When the supply solution is supplied from the supply section () to the primary fluid circulation tube () via the supply liquid circulation tube (), a pressure P1 of the supply liquid in the supply section () and a pressure P2 of the primary fluid in the primary fluid circulation tube satisfy the formula P−P.