The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2012
Filed:
Mar. 28, 2007
Makoto Kataoka, Tokyo, JP;
Katsumi Kakuta, Tokyo, JP;
Yo Yamagata, Tokyo, JP;
Yuichi Kanayama, Tokyo, JP;
Makoto Kataoka, Tokyo, JP;
Katsumi Kakuta, Tokyo, JP;
Yo Yamagata, Tokyo, JP;
Yuichi Kanayama, Tokyo, JP;
Asahi Kasei EMD Corporation, Tokyo, JP;
Abstract
The present invention relates to a magnetic sensor with which magnetic characteristics are made extremely stable by consideration of an area of contact of a base layer of a magnetic substance and a semiconductor substrate. On a semiconductor substrate () a plurality of Hall elements () are embedded so as to be coplanar to a top surface of the semiconductor substrate while being mutually spaced apart by a predetermined distance, and above the Hall elements and the semiconductor substrate, a base layer (), having coefficient of thermal expansion differing from that of the Hall elements and partially covers a region of each Hall elements, is formed via a protective layer (), and a magnetic flux concentrator (), having an area larger than the base layer and with magnetic amplification, is formed on the base layer. An area of contact of the base layer of the magnetic substance and the semiconductor substrate is made small to lessen the generation of an offset voltage.