The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2012
Filed:
Jul. 28, 2010
Applicants:
Jason W. Weigold, Newburyport, MA (US);
John R. Martin, Foxborough, MA (US);
Timothy J. Brosnihan, Natick, MA (US);
Inventors:
Jason W. Weigold, Newburyport, MA (US);
John R. Martin, Foxborough, MA (US);
Timothy J. Brosnihan, Natick, MA (US);
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); H01L 21/00 (2006.01); G10K 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming a microphone having a variable capacitance first deposits high temperature deposition material on a die. The high temperature material ultimately forms structure that contributes to the variable capacitance. The method then forms circuitry on the die after depositing the deposition material. The circuitry is configured to detect the variable capacitance.