The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8168460 B1

PDF
Full Text
Expired
Date of Patent:
May. 01, 2012

Filed:

Dec. 18, 2007
Applicants:

Hisayuki Miki, Chiba, JP;

Kenzo Hanawa, Ichihara, JP;

Yasumasa Sasaki, Kamakura, JP;

Inventors:

Hisayuki Miki, Chiba, JP;

Kenzo Hanawa, Ichihara, JP;

Yasumasa Sasaki, Kamakura, JP;

Assignee:

Showa Denko K.K., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for manufacturing a Group III nitride semiconductor light-emitting device according to the present invention, comprising forming, on a substrate, a semiconductor layer comprised of a Group III nitride compound semiconductor containing Ga as a Group III element by a sputtering method, wherein during the formation of the semiconductor layer, sputtering is performed under the condition where at least the surface layer of a sputtering target comprised of Ga is liquefied.


Find Patent Forward Citations

Miki, Hisayuki. (2012). Method for manufacturing group iii nitride compound semiconductor light-emitting device, group iii nitride compound semiconductor light-emitting device, and lamp (U.S. Patent No. 8168460). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8168460

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