The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2012
Filed:
Jul. 27, 2005
Stefan Hein, Blankenbach, DE;
Wolfgang Klein, Wörth, DE;
Stefan Hein, Blankenbach, DE;
Wolfgang Klein, Wörth, DE;
Applied Materials GmbH & Co. KG, Alzenau, DE;
Abstract
The invention relates to a vacuum treatment plant comprising an evaporator () for vacuum coating facilities. The evaporator () according to the invention comprises a device for guiding a supply line () movable in a gripping direction (A) and intended for gripping and positioning an evaporation boat () having a base () and further comprises two spacers () which the movable supply line () flexibly connects to the base (), with the spacers () being disposed on one side each with the movable supply line () and with the other side on the base (), thus enabling the first supply line () to be forcibly guided, and with the spacers () having such a length and configuration between the first supply line () and the base () that the guidance direction (B) is essentially parallel to the gripping direction (A) at least across a small deflection range of the spacers ().