The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2012
Filed:
May. 06, 2009
Applicants:
Yuichi Miyoshi, Niigata, JP;
Tohru Yamaoka, Osaka, JP;
Hidenori Notake, Osaka, JP;
Yusuke Takeuchi, Kanagawa, JP;
Inventors:
Yuichi Miyoshi, Niigata, JP;
Tohru Yamaoka, Osaka, JP;
Hidenori Notake, Osaka, JP;
Yusuke Takeuchi, Kanagawa, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
A MEMS device, including: a substrate having a first principal plane and a second principal plane opposite to the first principal plane; a through hole formed in the substrate; and a vibrating film formed over the first principal plane so as to cover the through hole. The first principal plane and the second principal plane are both a (110) crystal face; and the through hole has a substantially rhombic shape on the second principal plane.