The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2012
Filed:
Jun. 10, 2008
Applicants:
Tsuyoshi Ohshima, Chigasaki, JP;
Shin Hasegawa, Chigasaki, JP;
Noriyuki Watanabe, Hiratenka, JP;
Inventors:
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/22 (2006.01); H04R 17/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of stabilizing a frequency of a piezoelectric vibration element includes: disposing the piezoelectric vibration element in an atmosphere of a vapor of a ring-shaped dimethylpolysiloxane molecule, the piezoelectric vibration element having a metal layer on a surface of a piezoelectric substrate formed of a thickness slip based piezoelectric material; and making the ring-shaped dimethylpolysiloxane molecule subject to chemical absorption with a surface of the metal layer to form a layer of the ring-shaped dimethylpolysiloxane molecule.