The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Apr. 28, 2009
Haruna Kawashima, Haga-gun, JP;
Nobuyuki Saito, Utsunomiya, JP;
Haruna Kawashima, Haga-gun, JP;
Nobuyuki Saito, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An immersion exposure apparatus including an optical element, a reflective surface, a water repellent coating layerin which peeled areasandare formed, a light intensity sensorwhich detects light intensity of first light and second light, and an arithmetic processing unit which calculates a reflectance of the optical element, wherein the first light enters the projection optical system, passes through the peeled areato be reflected by the reflective surface, is reflected on a surface of the optical element, and passes through the peeled areato be received by the light intensity sensor, and the second light enters the projection optical systemand passes through the peeled areato be received by the light intensity sensorwithout being reflected on the reflective surfaceand the surface of the optical element
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