The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Aug. 25, 2009
Shinji Taniguchi, Kawasaki, JP;
Tokihiro Nishihara, Kawasaki, JP;
Masufumi Iwaki, Kawasaki, JP;
Masanori Ueda, Kawasaki, JP;
Go Endo, Yokohama, JP;
Tsuyoshi Yokoyama, Kawasaki, JP;
Takeshi Sakashita, Kawasaki, JP;
Motoaki Hara, Kawasaki, JP;
Shinji Taniguchi, Kawasaki, JP;
Tokihiro Nishihara, Kawasaki, JP;
Masufumi Iwaki, Kawasaki, JP;
Masanori Ueda, Kawasaki, JP;
Go Endo, Yokohama, JP;
Tsuyoshi Yokoyama, Kawasaki, JP;
Takeshi Sakashita, Kawasaki, JP;
Motoaki Hara, Kawasaki, JP;
Taiyo Yuden Co., Ltd., Tokyo, JP;
Abstract
A resonator includes a substrate, a lower electrode, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. The lower electrode includes a first film provided on the substrate, and a second film that is provided on the first film and has a specific gravity greater than that of the first film. The piezoelectric film is provided on the second film. The upper electrode includes a third film provided on the piezoelectric film, and a fourth film provided on the third film, the third film having a specific gravity greater than that of the fourth film. The third film is thicker than the second film.