The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Sep. 11, 2006
Kazuo Uetani, Osaka, JP;
Kaname Mizokami, Osaka, JP;
Yoshinao Ooe, Kyoto, JP;
Akira Shiokawa, Osaka, JP;
Hiroyuki Kado, Osaka, JP;
Kazuo Uetani, Osaka, JP;
Kaname Mizokami, Osaka, JP;
Yoshinao Ooe, Kyoto, JP;
Akira Shiokawa, Osaka, JP;
Hiroyuki Kado, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
An apparatus for forming a protective layer of magnesium oxide on a front glass substrate () in an evaporation chamber () includes the following: oxygen outlet openings () for introducing oxygen into the evaporation chamber (); water vapor outlet openings () for introducing water vapor into the evaporation chamber () from the downstream side in the transfer direction of the front glass substrate (); a mass analyzer () for measuring the ionic strength of hydrogen and the ionic strength of oxygen in the evaporation chamber (); and mass flow controllers () and () for controlling the introduction amount of the water vapor and the introduction amount of the oxygen, respectively, by the ionic strengths measured by the mass analyzer ().