The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Dec. 28, 2009
Akihiko Tashiro, Sayama, JP;
Hiroyuki Sasaki, Sayama, JP;
Akihiko Tashiro, Sayama, JP;
Hiroyuki Sasaki, Sayama, JP;
Nihon Dempa Kogyo Co., Ltd., Tokyo, JP;
Abstract
To provide a method of manufacturing a quartz-crystal resonator, in which without adding new processes, a desired quartz-crystal piece can be obtained from a quartz-crystal wafer by etching and electrodes can be provided without restraint. When a quartz-crystal pieceis formed, etching maskshaving dummy regionsthat are provided at two positions corresponding to corner portions on a +X side of the quartz-crystal pieceand extend toward a +X axis direction of a wafer W are formed, and when the quartz-crystal pieceis formed, etching in groove portionsat positions corresponding to the dummy regionsis delayed. Accordingly, it is possible to form the quartz-crystal piecewithout chipped portions at the corner portions in a state where the quartz-crystal pieceand the wafer W are connected to and supported by a connection support portion