The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2012
Filed:
Jan. 29, 2007
Toshihiko Maeda, Kirishima, JP;
Toshihiko Maeda, Kirishima, JP;
Kyocera Corporation, Kyoto, JP;
Abstract
The present invention relates to a microelectromechanical device having a simple structure in which strains of the semiconductor substrate can be reduced. Both a semiconductor substrateand a second substrateare disposed to face a first main surfaceof the first substrateand connected to the first main surfaceof the first substrate. With this structure, no internal line or side surface line is necessary, and the structure of the first substratecan be simplified. The length of the line can be decreased to decrease the resistance of the line, and good electrical characteristics can be achieved at low energy consumption. The strains in the semiconductor substratecan also be reduced.