The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2012
Filed:
Feb. 25, 2009
Applicants:
Tomoko Kutsuzawa, Kawasaki, JP;
Akihiko Fujisaki, Kawasaki, JP;
Tetsuyuki Kubota, Kawasaki, JP;
Atsushi Furuya, Kawasaki, JP;
Nobuyoshi Yamaoka, Kawasaki, JP;
Inventors:
Tomoko Kutsuzawa, Kawasaki, JP;
Akihiko Fujisaki, Kawasaki, JP;
Tetsuyuki Kubota, Kawasaki, JP;
Atsushi Furuya, Kawasaki, JP;
Nobuyoshi Yamaoka, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A magnet unit for a magnetron sputtering system includes a base plate and a plurality of magnet parts each including a first magnet and a first supporting member. The first supporting member supports the first magnet and fixes the first magnet to the base plate. The magnet parts confine a plasma.