The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2012
Filed:
Mar. 13, 2009
Koichi Yoshida, Yokohama, JP;
Koichi Yoshida, Yokohama, JP;
Murata Manufacturing Co., Ltd., Kyoto, JP;
Abstract
An external force detection device includes a weight portion, a supporting portion, and a beam portion provided in an SOI substrate which includes an upper layer and a lower layer that are capable of being etched with a first etching gas and sandwich an intermediate layer that is capable of being etched with a second etching gas. The weight portion is displaced in accordance with an external force to cause the beam portion to deform. The upper layer in a gap portion between the weight portion and the supporting portion is etched. The lower layer in the gap portion and the lower layer below the beam portion are etched. The intermediate layer in the gap portion is then etched. The groove formed by etching the upper layer has a multidirectional two-dimensional shape.